Scienta Omicron / MBE-Komponenten UHV MBE Multiprobe E-Beam Evaporation System – EBVM200, GENIUS, HABS, SH150, StarCell, TMU201

For sale is a used professional UHV / MBE / thin-film deposition research system, based on Scienta Omicron / Omicron Nanotechnology and MBE-Komponenten Dr. Eberl components.

The system appears to be a highly equipped UHV/MBE deposition platform with EBVM200 multi-pocket e-beam evaporator, Ferrotec/Temescal GENIUS e-beam controller, HABS hydrogen atom beam source, SH150 substrate manipulator/heater, Varian StarCell ion pump, Pfeiffer TMU201 turbo pump, Omicron system control electronics, thickness/rate monitoring and original documentation.

The system was removed from a laboratory/research environment and is offered as shown. It has not been fully tested under vacuum or high voltage at our facility.

Main components included

• Scienta Omicron / Omicron Nanotechnology UHV MBE Multiprobe system
• MBE-Komponenten Dr. Eberl EBVM200-4x8-Si multi-pocket e-beam evaporator, DN200CF
• Ferrotec / Temescal GENIUS e-beam controller with HV control cabinet and dedicated HV cables
• MBE-Komponenten HABS-40-AS Hydrogen Atom Beam Source
• MBE-Komponenten SH150-1T25-S substrate manipulator / sample heater with tantalum wire heater
• Manipulator rotation/RPM controller, MBE-Komponenten GmbH
• Omicron Nanotechnology system controller for MBE chamber, turbo control, gate valves, interlocks and bakeout control
• Varian StarCell ion pump
• Varian MidiVac ion pump controller
• Varian sublimation / TSP controller
• Pfeiffer Vacuum TMU 201 turbo molecular pump, DN100 CF-F, 210 l/s
• Vacuubrand MD 4BRL diaphragm backing pump
• Sycon STM-100/MF thickness / rate monitor
• Deposition rate sensor / QCM head
• TDK-Lambda GEN40-19 programmable DC power supplies, used for substrate / lamp heater / HABS channels
• Sample shutter / shutter assemblies
• MBE-Komponenten 4-position source/shutter/selector assembly
• UHV chamber with CF flanges, valves, feedthroughs, wiring and related process hardware
• Sample carriers, calibration carriers, masks, holders and material samples
• Original documentation and manuals for Omicron, Varian, VIC Scienta and system components

Accessories / process items

Various UHV/MBE sample carriers, calibration carriers, masks, sample plates and deposited material samples are included. Some items are marked with material names such as Co, Ni, Au, Ta, Si, C. Certain items are marked CMR / cobalt / nickel and should be handled according to professional laboratory safety procedures.

Documentation

Original manuals and CDs are included, including Omicron Nanotechnology UHV system component documentation, Varian ion pump manuals and VIC Scienta / system documentation.

Condition

Used research equipment, removed from a laboratory environment.

The system has not been fully tested under vacuum or high voltage after removal. The current condition of individual filaments, crucibles, shutters, sensors, pumps, vacuum seals and electronic channels is unknown. Sold as shown, for professional users, research laboratories, refurbishment, recommissioning or spare parts use.

Inspection before purchase is welcome and recommended.

Important notes

The system contains high-voltage, UHV, e-beam evaporation, heating and vacuum components. It should only be handled, installed and operated by qualified professional users familiar with UHV/MBE equipment.

Professional packing, palletizing/crating and worldwide freight can be arranged. Loading on site is possible. Please contact us before purchase to confirm the exact scope of delivery, transport details and export/shipping requirements.

Professional packing and worldwide freight can be arranged. Loading on site is possible. Please contact us before purchase to confirm transport details and exact scope of delivery.