Fairchild Convac CBA-M-6000 FM6000 Wafer Coater Developer Track 400V 6kVA 1996

The Fairchild Convac CBA-M-6000, also known as FM 6000, is a modular wafer coating and developing system for semiconductor process technology, manufactured in 1996 by Fairchild Convac GmbH in Vaihingen/Enz, Germany.

Supply voltage is 3 x 400 V at 50/60 Hz with a rated power of 6 kVA. Media connections: nitrogen 5 bar, compressed air 5 bar, vacuum -0.8 bar. CE marked.

The following components are included among others:

Mykrolis / Millipore / Entegris IntelliGen Mini Chemical Dispense Module

Millipore / Mykrolis Chemical Dispense Pumps

Stainless steel pressure vessels

Spin bowl / wafer chuck / wafer process module

Hotplate / coolplate / process stations

Temperature controllers including West 6100+

SMC pneumatic components, valves and regulators

Control cabinet with control and power electronics

Various sensors, lines and process components

Manufacturer: Fairchild Convac GmbH, Vaihingen/Enz, Germany

Type: CBA-M-6000 / FM 6000

Year of manufacture: 1996

Supply voltage: 3 x 400 V, 50/60 Hz

Power: 6 kVA

Media connections: nitrogen 5 bar, compressed air 5 bar, vacuum -0.8 bar

Certification: CE

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