Evatec Solaris S151 Multi-Chamber Sputtering System

The device is disassembled and stored in a warm and dry warehouse.

Processable substrates: with Ø 200 mm or 156 mm × 156 mm edge length

Maximum thickness: 2 mm

Capacity (depending on configuration and layer structure): up to 1200 substrates per hour

Cycle time: < 3 seconds

Dimensions and weight of the system:

Main system dimensions: L × W × H [cm] = 335 × 225 × 155

Main system weight: 3.3 t

Media supply:

Gases: argon, oxygen, forming gas (Ar:H2 = 95:5), nitrogen

High voltage

Compressed air

Cooling water

USED, IN GOOD VISUAL CONDITION, NOT TESTED.

Packing and preparation for shipment available upon request.