Scienta Omicron UHV-MBE-System EBVM200 GENIUS HABS SH150 StarCell TMU201

The Scienta Omicron / Omicron Nanotechnology UHV-MBE system is a comprehensively equipped UHV/MBE evaporation and thin film deposition platform featuring electron beam evaporation, hydrogen atom beam source, sample manipulation, substrate heating, ion pump, turbo pump, film thickness and rate monitoring, shutter assemblies, UHV feedthroughs and original control electronics. The system was removed from a research and laboratory installation.

Included main components:

• Scienta Omicron / Omicron Nanotechnology UHV-MBE chamber / Multiprobe system
• MBE-Komponenten Dr. Eberl EBVM200-4x8-Si(m)-2002438 multi-pocket electron beam evaporator on DN200CF
• Ferrotec / Temescal GENIUS E-Beam Controller
• Ferrotec HVPS-3kW high voltage power supply, S/N 5970, 400 VAC, 3-phase, 50/60 Hz, 16 A
• HVP high voltage power supply / FPS filament power supply
• Associated high voltage cables, HV cable interlocks and system wiring
• MBE-Komponenten HABS-40-AS-2002538 Hydrogen Atom Beam Source
• MBE-Komponenten SH150-1T25-S-2002738 1" manipulator with tantalum wire heater
• MBE-Komponenten MCU-03 Manipulator Control Unit, 2001838
• Manipulator rotation / RPM control
• Omicron Nanotechnology System Controller, S/N 527, 90-264 V, 550 VA
• Varian StarCell ion pump
• Varian MidiVac ion pump controller, model 929-5002S003, S/N 218921
• Varian Sublimation / TSP Controller, model 9290023S003, S/N 222707
• Pfeiffer Vacuum TMU 201 turbomolecular pump, DN100 CF-F, 210 l/s
• Vacuubrand MD 4BRL diaphragm vacuum pump
• Sycon Instruments STM-100/MF thickness/rate monitor with RS-232 and analogue interface
• Deposition rate sensor / QCM head
• TDK-Lambda GEN40-19 programmable DC power supplies
• TDK-Lambda GEN750W power supply module in control cabinet
• Sample shutter and further shutter assemblies
• MBE-Komponenten 4-position source / shutter / selector assembly
• CF viewport and observation window on the UHV chamber
• UHV chamber with CF flanges, valves, feedthroughs, bellows, manipulators, viewports and process accessories
• Sample carriers, calibration carriers, masks, holders and material samples
• Original documentation, manuals and CDs

The control cabinet contains original system electronics including Ferrotec GENIUS E-Beam controller, Ferrotec HVPS-3kW, Omicron System Controller, Varian MidiVac controller, Varian TSP controller, Sycon STM-100/MF, TDK-Lambda power supply modules, HV cables, interlock wiring and sensor cables.

Included accessories comprise sample carriers, calibration carriers, masks, sample plates, holders and coated material samples. Some parts are labelled with material designations including Co, Ni, Au, Ta, Si and C. Some accessories are marked CMR/Cobalt/Nickel and must be handled in accordance with professional laboratory and safety regulations.

Some viewports show visible deposits from previous operation.

Original documentation and manuals are included, covering Omicron Nanotechnology UHV system components, Varian ion pump manuals, VIC Scienta system documentation, MBE-Komponenten operating instructions, GENIUS documentation and documentation for EBVM200, HABS, SH150 and MCU-03.

The system was not fully tested under vacuum or high voltage following disassembly.

The current condition of individual filaments, crucibles, shutters, sensors, vacuum seals, pumps, electronic channels and process functions is unknown.

The system is sold as shown.

Inspection prior to purchase is possible and recommended.

Shipping information

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Depending on the type of cargo and the destination, we ship goods in parcels, on pallets, in individually prepared wooden crates, or sea containers.