STS 310-PC RIE Reactive Ion Etch System / Plasma Etcher / 4” Wafer Tool / SPTS

For sale: STS 310-PC RIE System — Reactive Ion Etch System, Serial No. 310001.

This is a laboratory / semiconductor plasma processing system from Surface Technology Systems / STS, designed for reactive ion etching and plasma processing of wafers/substrates. The system is suitable for research, MEMS, microfabrication, thin film and semiconductor laboratory applications.

The nameplate on the unit identifies it as:

STS 310-PC RIE System

Reactive Ion Etch System

Serial No.: 310001

The system appears to be based on the STS 310PC platform. According to the available technical information for this type of configuration, STS 310PC systems may be configured as parallel-electrode plasma reactors for 4” substrates, with RF power and process gas control depending on the exact system configuration.

Possible process applications include, depending on configuration and condition:

• Reactive Ion Etching / plasma etching
• Surface activation / plasma treatment
• Semiconductor and MEMS laboratory processing
• 4” silicon substrate / wafer processing
• SiO₂ / Si₃N₄ related plasma processes, depending on installed gases and configuration
• Research and development use
• Spare parts donor for STS / SPTS 310PC systems

Visible / included items:

• STS 310-PC main process system
• Process chamber
• Control cabinet / electronics section
• Operator PC / workstation cart visible in photos
• Gas line connections visible at installation location
• Accessories/components as shown in the photos

Important note:

The system is offered as used equipment, untested by us, without process guarantee. We did not perform a full functional or process test. The buyer is responsible for inspection, installation, safety checks, process qualification and connection to the required pumps, gases, cooling and utilities.

Due to the nature of this type of equipment, it is sold preferably to professional users, laboratories, semiconductor service companies or equipment refurbishers.

Condition:

• Used
• Removed from laboratory environment
• Not process-tested by us
• Sold AS IS
• No warranty on process performance
• Further technical inspection recommended before use

We can pack the system professionally for international transport. Worldwide shipping possible on request. Collection by the buyer or buyer’s freight forwarder is also possible.