STS 310PC PECVD Plasma Tool + Alcatel RSV300 + Leybold Sogevac + PC

STS 310PC / DEPO32 Vacuum Deposition / Plasma Processing System

Industrial / laboratory thin film deposition system.

Complete system removed from working environment and offered as shown in photos.

Configuration appears to include:

• STS 310PC / DEPO32 main processing chamber
• Vacuum pumping package
• Alcatel RSV300 Roots booster pump
• Leybold Sogevac backing pump
• RF / process control electronics
• Control rack and power modules
• Control computer + monitor
• Software disks / documentation / accessories shown in photos
• Vacuum piping and installed connections

System was acquired together with original electronics and accessories.

Condition

• Removed from facility and stored dry
• Current operational status not verified after removal
• Sold as used equipment
• No process qualification performed
• No vacuum performance measurements performed
• Sold exactly as shown in pictures

Applications (typical for this class of equipment)

• Thin film deposition
• PECVD / plasma processes
• Surface treatment
• Research and development
• Semiconductor / materials laboratory use

Included

✔ Main chamber system

✔ Vacuum pumps

✔ Electronics rack

✔ PC / monitor

✔ Documentation and accessories visible in photos

Shipping:

• Professional export packing possible. Worldwide shipping available.

We can pack the system professionally for international transport. Worldwide shipping possible on request. Collection by the buyer or buyer’s freight forwarder is also possible.