EBARA A10S Dry Vacuum Pump 60/72m³/h Semiconductor 3Ph 200V N2 Water Cooled

EBARA A10S Multi-Stage Dry Vacuum Pump System

For sale is an original EBARA A10S multi-stage dry vacuum pump system, equipped with control panel, N₂ purge system, cooling-water connections, EBARA interfacing unit and VAT vacuum valve assembly.

The A10S is a dry process vacuum pump designed for demanding industrial and semiconductor applications.

Manufacturer

EBARA Corporation

Model

A10S

Unit No.

A70072

Main specifications

• Pump type: multi-stage dry vacuum pump
• Pumping speed:
• 1000 l/min at 50 Hz
• 1200 l/min at 60 Hz
• Equivalent pumping speed:
• 60 m³/h at 50 Hz
• 72 m³/h at 60 Hz
• Ultimate pressure:
• 5.3 Pa at 50 Hz
• 4.0 Pa at 60 Hz
• Motor power: approx. 2.2 kW
• Power supply:
• 3-phase 200 V / 50 Hz
• 3-phase 200–220 V / 60 Hz
• Current rating:
• approx. 11.7 A / 50 Hz
• approx. 11.1 A / 60 Hz
• Inlet connection: NW40
• Outlet connection: NW40
• Cooling water consumption: approx. 3.5 l/min
• Approximate weight: 220 kg

Installed equipment

The system includes, as pictured:

• EBARA A10S dry vacuum pump
• EBARA control/display panel
• EBARA interfacing unit
• N₂ regulator and purge connection
• Cooling-water supply and return connections
• VAT vacuum valve
• Stainless-steel vacuum piping
• Signal/control cabling
• Mobile frame with casters

Condition

Used industrial equipment in good overall cosmetic condition.

Normal signs of previous professional use are visible.

The pump was previously installed in an industrial process vacuum system.

Please carefully inspect all photographs, as they show the exact unit and configuration offered for sale.

Unless expressly stated otherwise, the system is sold as pictured.

Typical applications

Suitable for:

• semiconductor manufacturing equipment
• process vacuum systems
• plasma processing
• CVD / PECVD
• etching
• coating systems
• load-lock applications
• research vacuum systems
• industrial vacuum processes

Shipping

Worldwide shipping available.

Due to the weight and size of the system, it will be shipped by freight on a pallet or in a suitable wooden transport crate.

Please contact us for an exact shipping quotation.