ALCATEL RSV602 / R 602 W CVD Roots Vacuum Booster – Fomblin – Busch QA Certificate

ALCATEL RSV602 / R 602 W CVD Roots Vacuum Booster – Fomblin – Busch QA Certificate

For sale is an original ALCATEL R 602 W CVD / RSV602 Roots vacuum booster, manufactured in France and configured for Fomblin/PFPE operation.

This unit was previously professionally inspected and tested by Busch Semiconductor Vacuum Group.

Manufacturer: Alcatel

Model / Type: R 602 W CVD / RSV602

Serial Number: 996853

Application: Roots vacuum booster

Country of manufacture: France

Motor: Leroy-Somer LS90L

Motor power: 1.5 kW

Supply: 3-phase

Documented system voltage: 400 V

Lubricant: FOMBLIN / PFPE

Busch Semiconductor Vacuum Group documentation

The original Quality Assurance Test Certification supplied with this exact unit identifies:

• Manufacturer: Alcatel
• Pump Type: Booster
• System Model: RSV602
• System S/N: 996853
• System Voltage: 400 V
• Oil Type: FOMBLIN
• Electrical Safety: OK
• System Leak Test: OK
• Ultimate Run: 22 hours
• Inlet Pressure achieved during documented test: <0.001 mbar

Please note that this certificate relates to the previous professional service/testing period and does not constitute a current calibration or 2026 performance certificate.

Application

The RSV602 is a Roots vacuum booster used in Alcatel/Adixen dry vacuum systems including the ADS602 series. It is suitable for demanding process-vacuum applications such as:

• semiconductor manufacturing
• CVD / PECVD processes
• thin-film processing
• vacuum coating
• plasma processing
• process vacuum systems
• research vacuum installations

Condition

Used industrial semiconductor vacuum equipment.

The unit is in good overall cosmetic condition with normal signs of previous professional use.

The original Busch QA documentation is included.

Unless otherwise explicitly agreed prior to purchase, the current vacuum performance has not been re-certified after removal from service.

Please inspect all photographs carefully. They show the exact item offered for sale.

Backing pump is not included.

Worldwide shipping available. Professional pallet or wooden-crate packing can be arranged.